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Modbus RTUIndustrial EthernetCANopenMEMS Sensor

BURKERT 20141511 Type 8741 Mass Flow Controller / Meter for Gases

BURKERT Type 8741 Mass Flow Controller (MFC) and Meter (MFM) for gases. Features nominal flow ranges up to 160 l/min, high accuracy, fast response times, and Modbus RTU/Industrial Ethernet interfaces.

BURKERT 20141511 Type 8741 Mass Flow Controller / Meter for Gases

BURKERT Type 8741 mass flow controller (MFC) and mass flow meter (MFM) for gases is suitable for a variety of applications and is available with industrial Ethernet, analogue, or fieldbus interfaces. The variant with CANopen-based Bürkert Systembus (büS) is suitable for integration into existing CANopen networks or, in combination with the Type ME43 fieldbus gateway, for integration into all common industry standards for Industrial Ethernet and/or fieldbus. Type 8741 can be configured as an MFM or an MFC according to demand. Furthermore, a Modbus RTU variant is also available. The thermal MEMS sensor is located directly in the gas stream and therefore achieves very fast response times. As the actuator, a Bürkert direct-acting proportional valve guarantees high response sensitivity.

General Technical Data

Product properties
Material
SealFKM or EPDM (depending on gas)
HousingPC (polycarbonate)
Base blockAluminium or stainless steel 1.4404/316L
Wetted partsStainless steel 1.4310/302, 1.4113/434, 1.4305/303
Total weightApprox. 500 g (aluminium base block)
Performance data
Nominal flow range ($Q_N$)10 ml...160 lN/min ($N_2$)
Operating pressureMFM: max. 25 bar
MFC: max. 25 bar
Measuring accuracy±0.8% MV ±0.3% FS
Repeatability±0.1% FS
Turndown ratio1:50, optionally 1:100
Settling time (MFC) / Response time (MFM) ($t_{95}$)<300 ms
Electrical data
Operating voltage24 V DC
Power consumption1...3 W (as MFM)
Max. 3...19.5 W (as MFC)
Medium data
Operating mediumNeutral, pure gases
Medium temperature-10 °C...+70 °C (-10 °C...+60 °C with oxygen)

Approvals and Conformities

  • North America (USA/Canada): Optional UL Listed (UL 61010-1, CAN/CSA-C22.2 No. 61010-1)
  • Foods and beverages/Hygiene: FDA (Code of Federal Regulations), USP (United States Pharmacopeial Convention) Class VI, EC Regulation 1935/2004
  • Oxygen: Optional suitability for gaseous oxygen

Product Connections

Modbus RTU

PinAssignment
1Not connected
2GND
324 V
4Not connected
5Not connected
6RS-485-Y
7RS-485-Z
8RS-485-B
9RS-485-A
HousingShielding

Performance Specifications

Nominal Flow Rate of Typical Gases

(Values refer to 1.013 bar abs and 273.15 K)

GasMin. $Q_N$ [l/min]Max. $Q_N$ [l/min]
Acetylene0.0165
Helium0.011000
Carbon dioxide0.0280
Air0.01160
Methane0.01160
Oxygen0.01160
Nitrogen0.01160
Hydrogen0.011000
Propane0.0344

Product Operation

Measurement Principle

The measured values are recorded in a secondary channel. A laminar flow element in the main channel creates a slight pressure drop. A part of the gas flow is thereby directed into the secondary channel. The sensor located there records the mass flow as a temperature difference. The measurement is performed in a specially shaped flow channel whose wall contains a silicon chip with an etched membrane. A heating resistor and 2 temperature sensors, one upstream and one downstream, are attached on this membrane.

If the heating resistor is fed with a constant voltage, the differential voltage of the temperature sensors indicates the flow rate of the gas flowing over the chip.

BURKERT 20141511 BURKERT Type 8741 measurement principle diagram

Configuration Management

If a device needs to be replaced, the memory card can be removed from the defective device and inserted into the new device. This transfers all data from the device to be replaced to the new device.